KLA INSTRUMENTS
CONTACT STYLUS PROFILERS (P-Series & Alpha-Step)
Step Height, Roughness, Waviness Measurements
Stress Measurement
50 ang – 1.2mm feature height
2D and 3D Profile Scans
NON-CONTACT OPTICAL PROFILERS (Zeta & Profilm 3D)
ZDot Based Optical Profilers
Measure low contrast, high roughness surfaces
True Color Imaging & Microscopy Capable
Automated Optical Inspection Options
NANOINDENTERS (Nanomechanics)
Accurate measurement on harness and modulus
Scratch, dynamic testing, SPM & high-temperature indentation
Mapping – NanoBlitz 3D allows up to 1s/indent
Continuous Stiffness Measurement supports modulus and hardness as a function of indentation depth
THIN FILM MEASUREMENT (Filmetrics F-Series)
High-resolution single spot
Small spot-size – rough film thickness
Site mapping, programmable, in-situation OEM
IR-VIS-UV spectrums